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ISBN
:
9780824799519
Publisher
:
CRC Press
Subject
:
Technology: General Issues, Chemistry, Technology, Engineering, Agriculture
Binding
:
HARDCOVER
Pages
:
336
Year
:
1998
₹
19704.0
₹
17930.0
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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
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